Equipment

Analytic Equipment

Scanning Electron Microscope

Transistor Parameter Analyzer

Impedance Analyzer

Network Analyzer

4 Point Probe

Metallurgical Microscope

Fabrication Equipment

Photolithography Equipment

Filament Evaporation

RF and DC Magnetron Sputtering

E-Beam Evaporation

Diffusion Furnaces

Annealing Furnaces

Reactive Ion Etching

Plasma Enhanced Chemical Vapor Deposition

Plasma Etching

Wet Etch Stations

Microscopes

4 Point Probe

Wire Bonders

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Last Modified: March 19, 2002 6:20 PM
© CAAT Research Group, 2001
CAAT Director: Dr Donald Malocha
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Photolithography Equipment Filament Evaporation RF and DC Magnetron Sputtering E-Beam Evaporation Diffusion Furnaces Annealing Furnaces Reactive Ion Etching Plasma Enhanced Chemical Vapor Deposition Plasma Etching Wet Etch Stations Microscopes 4 Point Probe Wire Bonders